ͨ¹ýƽչ»¯¡¢CMPÅ×¹âÒººÍBBÊÓѶÁ¢Òì½âËøÐÂÐÔÄÜ

ΪÁ˸úÉÏĦ¶û¶¨ÂɵijÌÐò£¬£¬£¬£¬ÏȽø·â×°¼¼ÊõÁ¢Òì¹ØÓÚʵÏÖÐÂÒ»´ú¸ßÐÔÄÜ¡¢¸ßÃܶȺÍСÐÍ»¯Æ÷¼þÖÁ¹ØÖ÷Òª¡£¡£¡£¡£¡£ÕâһתÐ͵Ľ¹µãÒÀÀµÒ»ÖÖÒªº¦¼¼Êõ£º»ùÓÚϸÃÜÌÕ´ÉÄ¥ÁϵĻ¯Ñ§»úеƽչ»¯£¨CMP£©¡ª¡ªÕâÊÇBBÊÓѶϸÃÜÅ×Ä¥ÓªÒµµÄ½¹µãרҵÁìÓò¡£¡£¡£¡£¡£
±¾ÆªÎÄÕÂ̽ÌÖÁËÏȽø·â×°µÄÖ÷ÒªÐÔ£¬£¬£¬£¬Æ½Õ¹»¯µÄÒªº¦×÷ÓÃÒÔ¼°¾Ûõ£ÑÇ°·Ó¦ÓÃÈÕÒæ͹ÏÔµÄÏà¹ØÐÔ¡£¡£¡£¡£¡£ÖصãÐðÊö»ùÓÚÏȽøÌÕ´ÉÄ¥ÁÏÖƳɵÄCMPÅ×¹âÒºÔõÑùÖúÁ¦Öª×ãÏÖ´ú°ëµ¼ÌåÖÆÔìµÄÑÏ¿ÁÒªÇ󡣡£¡£¡£¡£
ΪºÎÏȽø·â×°ÖÁ¹ØÖ÷Òª
ÏȽø·â×°ÔÊÐí¶à¸öоƬ»ò×é¼þ¼¯³Éµ½Ò»¸ö·â×°ÌåÖУ¬£¬£¬£¬ÔÚ¸üСµÄ¿Õ¼äÄÚÌṩ¸ü¸ßµÄ¹¦Ð§ÐÔ¡£¡£¡£¡£¡£Ëæמ§Ìå¹ÜÒ»Á¬Î¢Ëõ±äµÃÔ½À´Ô½ÄÑÌ⣬£¬£¬£¬ÏȽø·â×°³ÉΪÌáÉýÐÔÄܵÄÓÅÑ¡½â¾ö¼Æ»®¡£¡£¡£¡£¡£
ÕâЩ¼Æ»®£¬£¬£¬£¬Èç2.5D·â×°¡¢3D¼¯³É¡¢ÉȳöÐ;§Ô²¼¶·â×°£¨Fan-Out WLP£©ºÍϵͳ¼¶·â×°£¨SiP£©£¬£¬£¬£¬Äܹ»ÊµÏÖ¸ü¿ìµÄÐźŴ«Êä¡¢¸üµÍµÄ¹¦ºÄºÍ¸üµÍµÄÑÓ³Ù¡£¡£¡£¡£¡£¹ØÓÚÈ˹¤ÖÇÄÜ¡¢»úеѧϰ¡¢Æû³µµç×ÓºÍ5GͨѶµÈÓ¦ÓöøÑÔ£¬£¬£¬£¬ÓÉÓÚʵʱ´¦Öóͷ£º£Á¿Êý¾ÝµÄÐèÒª£¬£¬£¬£¬ÏȽø·â×°ÓÈΪҪº¦¡£¡£¡£¡£¡£ [(Semiconductor Engineering, 2023)]¡£¡£¡£¡£¡£

2.5D£¨×󣩺Í3D£¨ÓÒ£©°ëµ¼Ìå·â×°¼Ü¹¹Ê¾Àý

BBÊÓѶÌÕ´ÉCMPÄ¥ÁϵÄÆæÒìÓÅÊÆ

BBÊÓѶ¿ª·¢µÄÑõ»¯ÂÁºÍÑõ»¯ï¯Ï¸ÃÜÄ¥ÁÏרÃÅÓÃÓÚÖª×ãÏȽø·â×°ÖжÔƽչ»¯µÄ¿Á¿ÌÒªÇ󡣡£¡£¡£¡£BBÊÓѶĥÁϾßÓÐÆæÒìµÄÓÅÊÆ£ºÔھ߱¸¸ßÓ²¶ÈµÄͬʱ£¬£¬£¬£¬ÆäÊܿصÄÐÎòÄܹ»ÊµÏÖ¸ßЧµÄÖÊÁÏÈ¥³ýÂÊ£¨MRR£©£¬£¬£¬£¬ÓÈÆäÊÇÓ¦ÓÃÓÚ¾Ûõ£ÑÇ°·µÈ¾ßÓÐÌôÕ½ÐÔµÄÖÊÁÏ¡£¡£¡£¡£¡£

»ùÓÚBBÊÓѶÑõ»¯ÂÁºÍÑõ»¯ï¯µÄCMPÅ×¹âÒºÅä·½Ö¼ÔÚ£º
??? ?ÓÐÓÃÈ¥³ýÅúÁ¿ÖÊÁÏ£¬£¬£¬£¬ÀýÈç¾Ûõ£ÑÇ°·½éµç²ã¡£¡£¡£¡£¡£
??? ?»ñµÃ¸ßÖÊÁ¿Íâò£¬£¬£¬£¬ÒÔÖ§³ÖÏÂÓηâ×°°ì·¨¡£¡£¡£¡£¡£
??? ?ÔÚ²î±ðÐÎò£¨ÓÈÆäÊÇ2.5DºÍ3D·â×°³¡¾°£©Ï¼á³ÖÎȹ̵ÄÐÔÄÜ¡£¡£¡£¡£¡£
BBÊÓѶϸÃÜÅ×Ä¥ÓªÒµÔÚ¾Ûõ£ÑÇ°·Ó¦ÓÃÁìÓòÈ¡µÃÍ»ÆÆÐÔÏ£Íû¡ª¡ªÆä׿ԽµÄÖÊÁÏÈ¥³ýÐÔÄÜÓëÍâòÖÊÁ¿¿ØÖÆ£¬£¬£¬£¬Õý³ÉΪÏÂÒ»´úоƬ¶Ñµþ¼°·â×°¹¤ÒÕÁ÷³ÌµÄÒªº¦Ö§³Ö¡£¡£¡£¡£¡£
ͨ¹ýÓÅ»¯»ù°åÓëÅ×¹âÒºÖ®¼äµÄÏ໥×÷Ó㬣¬£¬£¬BBÊÓѶÔÚ×ÊÖú¿Í»§»ñµÃ¸ßÖÊÁ¿µÄÍâò¹â½à¶È£¬£¬£¬£¬Í¬Ê±¼«´óÏ޶ȵؽµµÍΣº¦²¢Ìá¸ßÉú²úЧÂÊ¡£¡£¡£¡£¡£

ƽչ»¯ÔÚÏȽø·â×°ÖеÄÒªº¦×÷ÓÃ

ÏȽø·â×°µÄÒ»¸öÒªº¦·½ÃæÊÇÈ·±£ÏȽø·â×°²ãÖ®¼äµÄÍâò±ØÐè¾­ÓÉƽչ»¯´¦Öóͷ££¬£¬£¬£¬Ê¹Æäƽ»¬¡¢ÎÞȱÏÝ£¬£¬£¬£¬²¢ÎªºóÐø¼Ó¹¤×öºÃ×¼±¸¡£¡£¡£¡£¡£
ƽչ»¯ÒªÈ·±£µ±Ï¹¤Ðò»ñµÃµÄÐÎò»ò´Ö²Ú¶È²»»á×ÌÈźóÐø²ãµÄÃé×¼¡£¡£¡£¡£¡£ÈôÊÇ´¦Öóͷ£²»µ±£¬£¬£¬£¬ÕâЩ²»¹æÔòÐÔ¿ÉÄܵ¼Ö¼üºÏʧЧ¡¢Ãé×¼Îó²î»òµçÆøÐÔÄÜÊÜË𣬣¬£¬£¬ÕâЩ¶¼Êǵ±½ñ½ô´ÕÐÍоƬ¼Ü¹¹ÖеÄÒªº¦Î£º¦¡£¡£¡£¡£¡£
»¯Ñ§»úеƽչ»¯£¨CMP£©¹¤ÒÕʼÓÚÅúÁ¿ÖÊÁÏÈ¥³ý£¬£¬£¬£¬Ê¹ÓÃÑÐÄ¥¿ÅÁ£È¥³ý¾Ûõ£ÑÇ°·²¢Æ½ÕûÍâò¡£¡£¡£¡£¡£ËæºóÊǾ«¼Ó¹¤½×¶Î£¬£¬£¬£¬Ìṩƽ»¬¡¢ÔȳƵÄÍâòÐÎò£¬£¬£¬£¬Îª»ìÏý¼üºÏ£¨Hybrid Bonding£©»ò½øÒ»²½µÄ²ã³Á»ý×öºÃ×¼±¸[(Nimbalkar et al., 2023)]¡£¡£¡£¡£¡£
̽ÌÖ·â×°ÖеľÛõ£ÑÇ°·Ó¦ÓÃ
¾Ûõ£ÑÇ°·ÊÇÒ»ÖÖ¸ßÐÔÄܾۺÏÎ£¬£¬£¬ÒòÆäÓÅÒìµÄÈÈÎȹÌÐÔ¡¢ÄÍʪÐԺ͵͹¤ÒÕ±¾Ç®£¬£¬£¬£¬ÔÚÏȽø·â×°Öг£ÓÃ×÷²ã¼ä½éµçÖÊ [(Nature, 2022)]¡£¡£¡£¡£¡£ËüÔÚºó¶Ë¹¤ÒÕ£¨BEOL£©ÖÐÓÈΪ³£¼û¡£¡£¡£¡£¡£
ÔÚ¶àоƬÄ£¿£¿£¿é£¨MCM£©ºÍ¶ÑµþоƬÉèÖÃÖУ¬£¬£¬£¬¾Ûõ£ÑÇ°·³äµ±¾àÀë²ãºÍ±£»£»£»£»¤²ã£¬£¬£¬£¬±ØÐè¾ÙÐÐÔȳÆƽչ»¯ÒÔÔö½ø±ÊÖ±¼¯³É¡£¡£¡£¡£¡£²»Æ½ÕûµÄ¾Ûõ£ÑÇ°·²ã¿ÉÄܵ¼ÖÂоƬ¶Ñµþ»òÖнé²ã£¨Interposer£©¼üºÏÀú³ÌÖб¬·¢åÐÒ£¡¢Ó¦Á¦µãºÍ²»Á¼µÄµçÆøÅþÁ¬¡£¡£¡£¡£¡£
ÔÚ²»¹ý¶ÈÅ×¹â»òËð»µÏ²ãµÄÌõ¼þÏ»ñµÃ׼ȷµÄÍâò¹â½à¶È£¬£¬£¬£¬ÊÇÒ»ÏîÐþÃîµÄƽºâÒÕÊõ£¬£¬£¬£¬¶ø»ùÓÚÌÕ´ÉÄ¥ÁϵÄCMPÅ×¹âҺʹ֮³ÉΪ¿ÉÄÜ [(GitHub CoWoS Guide)]¡£¡£¡£¡£¡£

BBÊÓѶºÍCMP

´Ó¾Ûõ£ÑÇ°·ÅúÁ¿È¥³ýµ½ÓÃÓÚ»ìÏý¼üºÏµÄ¾«Å׹⣬£¬£¬£¬ÌÕ´ÉÄ¥ÁÏÕýÔÚÍƶ¯Ð¾Æ¬¼¯³ÉµÄÏÂÒ»´Î±¼ÌÚ¡£¡£¡£¡£¡£BBÊÓѶϸÃÜÅ×ĥפ×ãÖÊÁÏרҵ֪ʶ£¬£¬£¬£¬ÒÔÁ¢ÒìÇý¶¯ÎªÒýÇ棬£¬£¬£¬È·±£BBÊÓѶ½â¾ö¼Æ»®Äܹ»Öª×ã×îÏȽøµÄ·â×°ÐèÇ󡣡£¡£¡£¡£

?